Publication: Acoustic Band Gap Filter Designs as a Potential Future RF MEMS Technology: An Introduction to Fractal Silicon-Based ABG Filters

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Title	Acoustic Band Gap Filter Designs as a Potential Future RF MEMS Technology: An Introduction to Fractal Silicon-Based ABG Filters
Authors/Editors*	John S. Hamel, Ryan Norris, Liping Yu
Where published*	ICM 2007, Egypt
How published*	Proceedings
Year*	2007
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Abstract	An introduction to acoustic band gap RF MEMS filters is given. These devices have the potential to enable integration of accurate fully solid state acoustic filtering that rival traditional surface acoustic wave filters, but which can be fully integrated into a silicon integrated circuit without requiring piezoelectric phenomenon. Newly developed two and three dimensional simulators are shown using full vector finite difference time domain method that can be used to explore and design the frequency responses of this new class of filter for potential MEMS applications. Impact on frequency response using fractal shaped inclusions is also investigated.