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14.2 Wall Surface Reactions and Chemical Vapor Deposition

For gas-phase reactions, the reaction rate is defined on a volumetric basis and the rate of creation and destruction of chemical species becomes a source term in the species conservation equations. The rate of deposition is governed by both chemical kinetics and the diffusion rate from the fluid to the surface. Wall surface reactions thus create sources (and sinks) of chemical species in the bulk phase and determine the rate of deposition of surface species.

Information about wall surface reactions and chemical vapor deposition is presented in the following subsections:

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